Delcom RD450 | Benchtop Non-Contact Surface Resistance Meter
Advantages of Eddy-Current Sheet Resistance Measurement
Non-destructive, non-contact measurement
• Measures conductive layers through insulating layers
• Measures samples while they are moving
• Enables real-time quality-control inspection
Reduce material and labor costs
• Automate testing without manual probing
• Test 100% of the material without damaging it
• Identify coating issues promptly
• Avoid further processing of nonconforming materials
Display and flat-panel display applications
• Flat-panel displays and touch panels
• Transparent conductive oxides (TCO) and transparent conductive materials (ITO, TCM)
• LED and OLED displays
• Carbon nanotubes (CNT), graphene and silver nanowires
• Metal mesh
Solar photovoltaic (PV) applications
• Thin-film solar cells: amorphous silicon, CIGS and CdTe
• Crystalline-silicon solar cells
• III-V solar cells
Semiconductor applications
• Ingot and boule property inspection
• Wafer property inspection
• Wafer-level and panel-level packaging (WLP/PLP), including FOPLP
Low-E architectural glass
• Soft-coated glass
• Hard-coated glass
Smart glass for commercial and residential buildings, automotive and aerospace
• Electrochromic glass (EC), thermochromic glass and photochromic glass
• PDLC glass, suspended-particle devices (SPD) and switchable metal mirrors (TMSM)
• Automotive glass for anti-glare, defrosting, heating and reflective functions
• Conventional rear-view mirrors for automotive and aerospace applications
Precision optics and optical coatings
Aerospace and defense
• Aircraft canopies and aerospace/defense optics
• Low-observability materials, spacecraft thermal-control materials and solar sails
Energy devices
• Battery cells and stacks, energy storage and fuel-cell components
Printing conductive inks
• Printed electronics and conductive inks
Flexible electronics, heating, shielding and antennas
• Flexible electronics and circuits; flexible printed circuit boards (PCBs)
• Antennas, heating equipment and thin-film heaters
• Radio-frequency identification (RFID)
Metalized capacitor foil
Electromagnetic-interference (EMI) and radio-frequency (RF) shielding
Converting and packaging
• Microwave-absorbing materials and barrier films
• Metalized films, decorative films and papers, and metalized labels
• Textiles and fibers, technical textiles, carbon-fiber fabrics and carbon fiber
Reflective and safety materials
Medical imaging materials
Other materials and applications
• High-performance coatings, antistatic films and LEDs
• Conductive fibers, textiles, felts and braids; nanowires, meshes and grids; powders
• Coated glass, coated polymers, conductive paints and metallic or organic conductors
• Roll-to-roll (R2R) coating, glass, wafers and films
Model
RD450
Measured parameters
• Sheet resistance (ohm/sq)
• Sheet conductance (Siemens/Square)
• Volume resistivity (ohm-cm)
• Thickness (micrometers)
• User-defined emissivity from 0 to 1
Sensor and stage dimensions
• Stage: 450 × 450 mm
• Measurement size at any point: 225 mm
• Sensor diameter: 26 mm
• Sensor gap: 3 mm
• Sensor measurement area: 26 mm diameter
Measurement ranges
• ×10: 5 to 100,000 ohms/square
• ×1: 0.5 to 10,000 ohms/square
• ÷10: 0.05 to 1,000 ohms/square
• ÷100: 0.005 to 100 ohms/square
Sample requirements
• Maximum thickness: 1.5 mm
• Minimum sample size: 26 mm diameter
• Maximum sample size: 450 mm
Power and temperature requirements
• Power input: 100–120/200–250 VAC
• Frequency: 60/50 Hz
• Power consumption: 1.0/0.5 A
• Operating temperature: 10–60 °C
Response and display rate
Delcom measures the sample every 30 ms. Its hardware and software balance processing speed and averaging by displaying eight averaged readings every 240 ms.
Accuracy
Delcom meters are calibrated to National Institute of Standards and Technology (NIST) standards, with accuracy greater than 99.9%. Users can complete the calibration setup in about one minute.
Resolution
Each significant digit is represented across all four measurement ranges.
Linearity
Delcom guarantees that the measured sheet resistance of test materials will deviate by no more than 3% from the true value. The chart below shows results from testing ten NIST, VLSI and MSA standards with Delcom instruments.
Repeatability
When sample placement and environmental conditions such as temperature remain unchanged, Delcom readings can achieve 99.9% repeatability.
Temperature compensation
The baseline reading of an eddy-current instrument can drift as ambient temperature changes. Delcom benchtop sensors are compensated so that drift does not exceed 0.04% of total resolution per degree Celsius per hour.
Effect of measurement distance on readings
The height of a conductive layer within the sensor gap affects the reading. This effect can be addressed with a stage, automatic compensation using a distance probe, or calibration against material at a known height.
Benchtop software
• PC application for Windows XP or later
• Customizable Python library
User-selectable measurement units
• Sheet resistance (ohm/sq)
• Sheet conductance (Siemens/Square)
• Volume resistivity (ohm-cm)
• Thickness (micrometers)
• User-defined emissivity from 0 to 1
Measurement modes for common workflows
• Test samples and capture results
• Scan and map samples
• Export sample data to plots to verify surface uniformity
• Set upper and lower limits to determine pass/fail status
Data logging, analysis and export
• Log and export data using CSV or Microsoft Excel
• Read and record measurements, perform manual scans, check pass/fail results, export CSV files and save data for further analysis
Use multiple sensors at the same time
• Select multiple probes for multi-point measurements
• Select multiple probes for different resistance ranges
User-adjustable performance variables
• Calibrate in under one minute with a standard sample
• Set vertical-offset compensation
• Set tare (zero) offset compensation
• Set gain-offset compensation
• Set pass/fail thresholds and alarms
• Set temperature-compensation coefficients
Automatic functions
• Auto-zero
• Automatic sample-sensor detection
• Automatic measurement logging
Add sensor ranges
Delcom sensors are supplied with any two adjacent measurement ranges. The available ranges are listed below.
Additional sensors can be purchased to cover the full measurement range.
×10: 5 to 100,000 ohms/square
×1: 0.5 to 10,000 ohms/square
÷10: 0.05 to 1,000 ohms/square
÷100: 0.005 to 100 ohms/square
Build a custom interface with the Python library
Use Delcom's Python library to build a custom interface. The library gives customers full control over and monitoring of the sensors.
Custom sensor spacing and measurement size
Instruments can be customized with different combinations of sensor spacing and measurement size. In general, a larger required gap calls for a larger sensor measurement area. Delcom configures custom instruments with an optimal combination of sensor size and spacing. Customers can specify the gap required for their thickest material while minimizing the sensor size.