AiT CMT-SR1000N four-point probe system for 4-inch wafer surface resistance and volume resistivity measurement with mapping analysis
AiT CMT-SR1000N four-point probe system for 4-inch wafer surface resistance and volume resistivity measurement with mapping analysis

AiT CMT-SR1000N 4-Inch Wafer Semi-Automatic Four-Point Probe Measurement System

The AiT CMT-SR1000N is a four-point probe measurement system for 4-inch wafers. It can be configured with a high-stability JANDEL probe from the UK to support precise measurement of surface resistance (Ω/□) and volume resistivity (Ω·cm). Multifunctional mapping software helps analyze resistance uniformity, and thickness data can also be calculated from resistance measurements to support further sample analysis.

• Surface resistance measurement for wafer, thin-film, solar, and related industries
• Displays measurement units: Ω, Ω/□, Ω·cm, and S
• Easy operation with automatic probe lowering for a single-point measurement at the center
• Equipped with a high-precision JANDEL probe head


• Measurement range
1 mΩ/□ to 2 MΩ/□
• Operation
Place the sample on the test platform and press the measurement key. The range adjusts automatically and displays the reading, including the decimal point and multiplier.
• JANDEL four-point probe head
The probe uses a JANDEL-designed quick-fit connector/adapter and requires no special tools or alignment fixture. Installation takes only a few minutes, and a JANDEL probe is included as standard equipment.
• Measurement display
Readings are shown directly on the instrument’s LCD panel.
• Measurement speed
Approximately 2 ± 1 seconds per point
• Internal component accuracy
±0.5% (high-precision resistance)
• Maintenance and service
Advanced microprocessor technology supports reliable, stable operation. Electronic components are mounted on printed circuit boards for easy replacement.
• Software data download
USB interface with data storage and retrieval (Windows version)

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